NUMERICAL ANALYSIS OF EFFECTS OF OPERATING CONDITIONS ON PURGING EFFICIENCY IN A VACUUM REGIME

T. Kim; H. Ahn; D. You

doi:10.6112/kscfe.2024.29.1.072

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Original Article

NUMERICAL ANALYSIS OF EFFECTS OF OPERATING CONDITIONS ON PURGING EFFICIENCY IN A VACUUM REGIME 저진공 영역에서 배관의 운전 조건에 따른 배관 퍼지 효과의 수치해석 연구

31 March 2024. pp. 72-79

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Abstract

Purging, the process of removing undesired or inert gases from a system, is of critical importance in various industries, including semiconductor manufacturing. The ability to accurately model and simulate purging processes can enhance the design and optimization of purging systems, leading to improved efficiency, reduced costs, and enhanced safety. Simulation of purging and neutralization within the pipe was conducted to understand the phenomena. The simulation explored in a vacuum regime to find optimal purging conditions by varying pressure difference of pipe inlet and outlet, operating pressure, and wall temperatures.

Keywords

배관(Pipe)

퍼지(Purge)

벽면 화학반응(wall surface reaction)

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Information

Publisher :Korean Society for Computational Fluids Engineering
Publisher(Ko) :한국전산유체공학회
Journal Title :Journal of Computational Fluids Engineering
Journal Title(Ko) :한국전산유체공학회지
Volume : 29
No :1
Pages :72-79
Received Date : 2024-01-07
Revised Date : 2024-01-29
Accepted Date : 2024-02-16
DOI :https://doi.org/10.6112/kscfe.2024.29.1.072

Journal of Computational Fluids Engineering ISSN:1598-6071(Print) 3022-6252(Online) 한국전산유체공학회지

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